| What
is Roiceram-HS |
Roiceram-HS is
highly purified silicon carbide/silicon components for semiconductor
manufacturing furnace.
It is developed and refined by Asahi Glass Company. |
| ‥ |
Roiceram-HS is specially designed and produced
to demonstrate its best performance in a semi conductor manufacturing
process. |
| ‥ |
Major Japanese furnace manufacturers have
approved Roiceram-HS as an OEM component. Roiceram-HS is widely
used by semi conductor fabricators, resulting in better yields
and higher furnace operati0n efficiency. |
| |
| For high temperature
process… |
| Because of superior strength
in high temperature processing, Roiceram-HS does not deform from
repeated use over 1000℃. Wafer slots and rods (rails) in boats
retain their original profile. Based upon the products stability/
resistance to HF in the etching, its service life increases greatly. |
| |
| For LPCVD process… |
| Thermal expansion coeffient
of Roiceram-HS and deposition film of LPCVD process (e.g. poly
silicon, silicon nitride) is consistent, thus particle generation
from the component is not a factor. This similarity allows increased
film thickness which extend etch cycle time. The result is operational
efficiency of LPCVD furnace is greatly improved. Periodic replacement,
which is typical with quartz components, can be eliminated because
Roiceram-HS is inert in the wet etch cleaning process(i.e. HF
and HF+HNO3). |
| |
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新竹事務所 賴承育 副理
新竹市300武陵路2號10樓
電話: 03-5340168
傳真: 03-5340228
電子郵件: mickey@hissan.com.tw |
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